Mark Sheplak

Professor University of Florida

Gainesville FL

Mark Sheplak's research focuses on the development of high-performance, instrumentation-grade, MEMS-based sensors aerospace applications.

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Biography

Mark Sheplak is currently a professor holding joint appointments in the Departments of Mechanical and Aerospace Engineering and Electrical and Computer Engineering. His current research focuses on the design, fabrication, and characterization of high-performance, instrumentation-grade, microelectromechanical systems (MEMS)-based sensors and actuators that enable the measurement, modeling, and control of various physical properties. Specific applications include technology development to enable large-channel count micromachined directional microphone arrays for aeroacoustic noise source localization and miniature skin-friction sensors for aerodynamic drag characterization and flow control. He co-founded the Interdisciplinary Consulting Corporation, which contributes several million dollars into the Gainesville economy each year.

Areas of Expertise

Small Business

Shear stress sensors

MEMS

Microphones

Acoustic arrays

Articles

Aluminum Scandium Nitride as a Functional Material at 1000°C

arXiv

Gaddam, et al.

2024-10-22

This study investigates the behavior of aluminum scandium nitride thin films in extreme thermal environments, demonstrating functional stability up to 1000°C, making it suitable for use in aerospace, hypersonics, deep-well and nuclear reactor systems.

A Miniaturized, Flush-Mount, IEPE MEMS Piezoelectric Pressure-Field Microphone for Aeroacoustic Applications

Aerospace Research Central

Mills, et al.

2024-05-30

This paper describes the development and experimental characterization of a miniaturized, flush-mount aeroacoustic pressure-field microphone designed for through-wall installation applications such as aeroacoustic microphone phased arrays and dynamic pressure sensing.

Gallium Nitride (GaN) MEMS Lamb Wave Resonators Operating At High Temperature Up To 800°C

IEEE Xplore

Sui, et al.

2024-02-22

We report on the first experimental demonstration of gallium nitride microelectromechanical Lamb wave resonators operating at high temperature up to 800°C, while retaining robust electromechanical resonances at ~32MHz and good quality factor of Q=450 at 800°C.